Ion Track Technology

PhysicsConsult

Reimar Spohr

PostHeaderIcon Abstract

Method for fabricating high temperature microfilters in polyimide (in German). R. Brandt, P. Vater, T.C. Zhu, R. Spohr, J. Vetter; German Patent DE 3816078 A1 (1988)

The microfilters are fabricated by irradiating a thermally and chemically resistant foil of polyimide with energetic heavy ions and etching the resulting latent ion tracks selectively. Depending on the etch medium, pores can be fabricated between 10 nm and 50 ┬Ám diameter. The microfilters are intended for high temperature applications in aggressive environments.