Ion Track Technology


Reimar Spohr

PostHeaderIcon Abstract

Ion Tracks and Microstructure Technology. Bernd Eberhard Fischer and Reimar Spohr. Nucl. Tracks Radiat. Meas.,vol. 15, 75-79 (1988).

Present-day microtechnology depends very much on the availability of suitable lithographic techniques for generating smaller and smaller structures, On this road, conventional techniques using light particles, such as photons or electrons, are approaching their technological limits. Our goal is to scrutinize the technique of ion track generation in order to extract technologically relevant propenies and predict potential fields of future applications. Examples of practical relevance are given.